Semiconductor devices and methods for forming the same

ABSTRACT

A semiconductor device and methods for forming the same are provided. The method includes providing a substrate having a first conductive type, forming an epitaxial layer having the first conductive type on the substrate, forming a trench in the epitaxial layer, forming a first insulating layer in the trench and on the top surface of the epitaxial layer, forming a shield electrode and a mask layer on the first insulating layer in order, using the mask layer to remove a portion of the first insulating layer, wherein the top surface of the first insulating layer is higher than the top surface of the shield electrode after removing the portion of the first insulating layer, removing the mask layer, forming a second insulating layer on the first insulating layer and the shield electrode, and forming a gate electrode on the second insulating layer.

BACKGROUND Field of the Invention

The embodiments of the invention relate to semiconductor technology, andin particular to split-gate trench power metal oxide semiconductorfield-effect transistors (trench power MOSFET) and methods for formingthe same.

Description of the Related Art

Technology that includes high-voltage elements is implemented intointegrated circuits with high voltages and high power. In order toachieve a high-withstand voltage and high current, the flow of thedriving current in a conventional power transistor has been developedfrom a horizontal direction to a vertical direction. A metal oxidesemiconductor field-effect transistor (MOSFET) having a trench gate hasbeen developed that is capable of effectively reducing on-resistance(Ron) and processing high currents.

A split-gate trench structure has recently been developed. Thesplit-gate trench power metal oxide semiconductor field-effecttransistor mainly comprises two electrodes vertically disposed in thegate trench. One electrode acts as a gate electrode and mainly controlsthe formation of the current channel of the metal oxide semiconductorfield-effect transistor. The other electrode acts as a shield electrodelocated directly below the gate electrode and can reduce the parasiticcapacitance between the drain electrode and the gate electrode. However,IGSSR leakage is likely to occur when forming the split-gate trenchstructure.

Therefore, it is necessary to search for split-gate trench power metaloxide semiconductor field effect transistors and methods for forming thesame that can minimize or solve the above problems.

BRIEF SUMMARY

According to some embodiments of the invention, a method for forming asemiconductor device is provided. The method includes providing asubstrate having a first conductive type, forming an epitaxial layerhaving the first conductive type on the substrate, forming a trench inthe epitaxial layer, forming a first insulating layer in the trench andon the top surface of the epitaxial layer, forming a shield electrodeand a mask layer on the first insulating layer in order, using the masklayer to remove a portion of the first insulating layer, wherein the topsurface of the first insulating layer is higher than the top surface ofthe shield electrode after removing the portion of the first insulatinglayer, removing the mask layer, forming a second insulating layer on thefirst insulating layer and the shield electrode, forming a gateelectrode on the second insulating layer, forming a well region having asecond conductive type in the epitaxial layer, the second conductivetype is different from the first conductive type, and forming a heavilydoped region having the first conductive type in the well region.

According to some embodiments of the invention, a semiconductor deviceis provided. The semiconductor device includes a substrate having afirst conductive type. An epitaxial layer having the first conductivetype is disposed on the substrate, and a trench is in the epitaxiallayer. A well region is disposed on the epitaxial layer and having asecond conductive type that is different from the first conductive type.A heavily doped region having the first conductive type is disposed onthe well region. A shield electrode is disposed in the trench, whereinthe shield electrode is separated from the epitaxial layer by a firstinsulating layer, and the top surface of the first insulating layer ishigher than the top surface of the shield electrode. The semiconductordevice also includes a gate electrode disposed in the trench and overthe shield electrode, wherein the gate electrode is separated from theepitaxial layer and the shield electrode by a second insulating layer.

A detailed description is given in the following embodiments withreference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention can be more fully understood by reading thesubsequent detailed description and examples with references made to theaccompanying drawings, wherein:

FIGS. 1A-1L show cross sections of various stages of a method forforming a semiconductor device according to some embodiments of theinvention.

DETAILED DESCRIPTION OF THE INVENTION

The following description is about semiconductor devices and methods forforming the same according to embodiments of the disclosure. However, itshould be appreciated that the embodiments of the disclosure providelots of suitable concepts of the invention and can be performed in awide variety of specific backgrounds. The specific embodiments of thedisclosure are used to explain the fabrication by specific methods anduse of the invention and should not be taken in a limiting sense. Thescope of the invention is best determined by reference to the appendedclaims. Moreover, the same or similar elements in the drawings and thedescription are labeled with the same reference numbers.

Referring to FIGS. 1A-1L, they show cross sections of various stages ofa method for forming a semiconductor device 100 according to someembodiments of the invention. Additional operations can be providedbefore, during or after the steps of the embodiments. In differentembodiments, some operations can be moved, omitted or replaced.Additional features can be added to the semiconductor device. Indifferent embodiments, some features described below can be moved,omitted or replaced.

According to some embodiments, as shown in FIG. 1A, a substrate 101having a first conductive type is provided, and the substrate 101 actsas the drain (D) of the semiconductor device 100. In some embodiments,the substrate 101 is made of silicon or another semiconductor material.Alternatively, the substrate 101 can include another elementsemiconductor material, such as germanium (Ge). In some embodiments, thesubstrate 101 can be made of compound semiconductor, such as siliconcarbide, gallium nitride, gallium arsenide, indium arsenide or indiumphosphide. In some embodiments, the substrate 101 can be made of alloysemiconductor, such as silicon germanium, silicon germanium carbide,arsenic gallium phosphide or indium gallium phosphide. In someembodiments, the substrate 101 includes silicon-on-insulator (SOI)substrate or another suitable substrate. In the embodiment, the firstconductive type is n-type, but it is not limited thereto. In otherembodiments, the first conductive type can be p-type.

Next, according to some embodiments, an epitaxial growth process isperformed. An epitaxial layer 102 is formed on the substrate 101. Thesubstrate 101 and the epitaxial layer 102 have the same conductive type,such as the first conductive type. In the embodiment, the epitaxiallayer 102 is n-type. In some embodiments, the epitaxial growth processcan be metal organic chemical vapor deposition (MOCVD), plasma-enhancedCVD (PECVD), molecular beam epitaxy (MBE), hydride vapour phase epitaxy(HYPE), liquid phase epitaxy (LPE), chloride vapour phase epitaxy(Cl-VPE), another suitable process or a combination thereof.

Next, according to some embodiments, as shown in FIG. 1B, a patternedmask 103 is formed on the epitaxial layer 102 through a lithographypatterning process. The patterned mask 103 has an opening 103 a. In theembodiment, the material of the patterned mask 103 can be photoresistmaterial. In other embodiments, the material of the patterned mask 103can be a hard mask made of an oxide layer and a nitride layer. In someembodiments, the lithography patterning process includes photoresistcoating (for example, spin-coating), soft baking, mask aligning,exposing, post-exposure baking, photoresist developing, washing anddrying (for example, hard baking), another suitable process, or acombination thereof.

According to some embodiments, as shown in FIG. 1C, after forming thepatterned mask 103, an etching process is performed on the epitaxiallayer 102 through the first opening 103 a of the patterned mask 103 toform a trench 104 in the epitaxial layer 102. In some embodiments, theetching process may be dry etch process, wet etch process, plasmaetching process, reactive ion etching process, another suitable processor a combination thereof. After forming the trench 104, the patternedmask 103 is removed. It should be understood that the size, shape andlocation of the trench 104 shown in FIG. 1C is only an example of theembodiments, but it is not limited thereto.

According to some embodiments, as shown in FIG. 1D, a first insulatinglayer 105 is formed in the trench 104 and on the top surface of theepitaxial layer 102 by an oxidation process, and an annealing process isperformed on the first insulating layer 105 to increase the density ofthe first insulating layer 105. In some embodiments, the firstinsulating layer 105 has a uniform thickness T1. In some embodiments,the thickness T1 is in a range between 50 nm and 500 nm. The thicknessT1 of the insulating layer 105 may be determined according to elementsize and design requirements of the semiconductor device. In someembodiments, the insulating layer 105 may be silicon oxide, germaniumoxide, another suitable semiconductor oxide material or a combinationthereof. In some embodiments, the oxidation process may be thermaloxidation, radical oxidation or another suitable process. In someembodiments, the annealing process may be a rapid thermal annealing(RTA) process.

According to some embodiments, as shown in FIG. 1E, a shield electrode106 is formed on the first insulating layer 105 in the trench 104 by adeposition process, lithography patterning process and etching process.In the embodiment, the shield electrode 106 fills the lower portion ofthe trench 104 but it does not completely fill the trench 104, and theshield electrode 106 is surrounded by the first insulating layer 105. Insome embodiments, the shield electrode 106 has a uniform thickness T2.In some embodiments, the thickness T2 is in a range between 500 nm and5000 nm. The thickness T2 of the shield electrode 106 may be determinedaccording to element size and design requirements of the semiconductordevice. In some embodiments, the material of the shield electrode 106may be a single layer or multiple layers structure and is formed ofamorphous silicon, polysilicon, one or more metals, metal nitride, metalsilicide, conductive metal oxide or a combination thereof. Specifically,the above-mentioned metal may comprise Mo, W, Ti, Ta, Pt or Hf, but itis not limited thereto. The above-mentioned metal nitride may compriseMoN, WN, TiN and TaN, but it is not limited thereto. The above-mentionedmetal silicide may comprise WSi_(x). The above-mentioned conductivemetal oxide may comprise RuO₂ and indium tin oxide (ITO), but it is notlimited thereto. In some embodiments, the deposition process may bephysical vapor deposition (PVD), chemical vapor deposition (CVD),another suitable process or a combination thereof. In some embodiments,the lithography patterning process include photoresist coating (forexample, spin-coating), soft baking, mask aligning, exposing,post-exposure baking, photoresist developing, washing and drying (forexample, hard baking), another suitable process, or a combinationthereof. In some embodiments, the etching process may be dry etchprocess, wet etch process, plasma etching process, reactive ion etchingprocess, another suitable process or a combination thereof.

Next, according to some embodiments, as shown in FIG. 1F, a maskmaterial layer 107 is formed on the first insulating layer 105 and theshield electrode 106. In some embodiments, the mask material layer 107completely fills the remaining portion of the trench 104. In someembodiments, the material of the mask material layer 107 is the same asthat of the patterned mask 103. In some embodiments, the mask materiallayer 107 is formed by the deposition process or coating process.

According to some embodiments, as shown in FIG. 1G, a portion of themask material layer 107 is removed to form a mask layer 107′, and theremaining space of the trench 104 is kept on the mask layer 107′. Insome embodiments, the mask layer 107′ is surrounded by the firstinsulating layer 105. In some embodiments, the mask layer 107′ has auniform thickness T3. In some embodiments, the thickness T3 is in arange between 50 nm and 500 nm. The thickness T3 of the mask layer 107′may be determined according to element size and design requirements ofthe semiconductor device. In some embodiments, the thickness T3 of themask layer 107′ is smaller than the thickness T2 of the shield electrode106.

Next, according to some embodiments, as shown in FIG. 1H, a portion ofthe first insulating layer 105 is removed by using the mask layer 107′as a mask, and a first insulating layer 105′ is kept. In the embodiment,the top surface of the first insulating layer 105′ is higher than thetop surface of the shield electrode 106, and the top surface of thefirst insulating layer 105′ is lower than the top surface of the masklayer 107′. In some embodiments, the first insulating layer 105′ alsohas a uniform thickness T1. In some embodiments, during the removingprocess, the portion of the first insulating layer 105 on the topsurface of the epitaxial layer 102 and the upper portion of the firstinsulating layer 105 in the trench are removed to expose a portion ofthe epitaxial layer 102 in the trench 104. In the embodiment, afterforming the first insulating layer 105′, the mask layer 107′ is removed.

According to some embodiments, as shown in FIG. 1I, a second insulatinglayer 108 is formed on the epitaxial layer 102, the first insulatinglayer 105′ and the shield electrode 106 by a deposition process. In someembodiments, the second insulating layer 108 has a uniform thickness T4.In some embodiments, the thickness T4 is in a range between 10 nm and200 nm. The thickness T4 of the second insulating layer 108 may bedetermined according to element size and design requirements of thesemiconductor device. In some embodiments, the thickness T1 of the firstinsulating layer 105′ (or first insulating layer 105) is greater thanthe thickness T4 of the second insulating layer 108. In the embodiment,the second insulating layer 108 forms a stepped upper surface on thefirst insulating layer 105′ and the shield electrode 106, and the firstportion of the second insulating layer 108 on the first insulating layer105′ is higher than the second portion of the second insulating layer108 on the shield electrode 106. In other embodiments, the secondinsulating layer 108 forms a U-shaped upper surface on the firstinsulating layer 105′ and the shield electrode 106. In some embodiments,the second insulating layer 108 may be silicon oxide, hafnium oxide,zirconium oxide, aluminum oxide, aluminum hafnium dioxide, siliconhafnium dioxide, silicon hafnium oxynitride, tantalum hafnium oxide,titanium hafnium oxide, zirconium hafnium oxide, another suitable high-kdielectric material or a combination thereof. In some embodiments, thematerial of the second insulating layer 108 is different from that ofthe first insulating layer 105′. In other embodiments, the material ofthe second insulating layer 108 is the same as that of the firstinsulating layer 105′. In the embodiment, the deposition process is aconformal deposition process and may be physical vapor deposition (PVD),chemical vapor deposition (CVD), another suitable process or acombination thereof.

According to some embodiments, as shown in FIG. 1J, a gate electrode 109is formed on the second insulating layer 108 in the trench 104 by adeposition process, lithography patterning process and etching process.In some embodiments, the material of the gate electrode 109 is the sameas that of the shield electrode 106. In some embodiments, the depositionprocess may be physical vapor deposition (PVD), chemical vapordeposition (CVD), another suitable process or a combination thereof. Insome embodiments, the lithography patterning process include photoresistcoating (for example, spin-coating), soft baking, mask aligning,exposing, post-exposure baking, photoresist developing, washing anddrying (for example, hard baking), another suitable process, or acombination thereof. In some embodiments, the etching process may be dryetch process, wet etch process, plasma etching process, reactive ionetching process, another suitable process or a combination thereof.

Due to the deposition of the mask layer 107′, excessive removal of thefirst insulating layer 105 can be avoided during the removal of aportion of the first insulating layer 105 (i.e. the undercut effect ofthe first insulating layer 105 can be avoided). In other words, by thedeposition of the mask layer 107′, after removing a portion of the firstinsulating layer 105, the top surface of the remaining portion of thefirst insulating layer 105 may be higher than the top surface of theshield electrode 106. Therefore, after depositing the second insulatinglayer 108, the IGSSR leakage is less likely to occur on the profile ofthe second insulating layer 108 formed on the first insulating layer105′ and the shield electrode 106. In addition, the profile of thesecond insulating layer 108 formed on the first insulating layer 105′and the shield electrode 106 can also reduce the Qgd, thereby improvingthe performance of the semiconductor device.

According to some embodiments, as shown in FIG. 1J, a third insulatinglayer 110 is formed on the gate electrode 109 by a deposition process,lithography patterning process and etching process. In some embodiments,the material of the third insulating layer 110 is different from that ofthe second insulating layer 108. In other embodiments, the material ofthe third insulating layer 110 is the same as that of the secondinsulating layer 108. In some embodiments, the deposition process may bephysical vapor deposition (PVD), chemical vapor deposition (CVD),another suitable process or a combination thereof. In some embodiments,the lithography patterning process may include photoresist coating (forexample, spin-coating), soft baking, mask aligning, exposing,post-exposure baking, photoresist developing, washing and drying (forexample, hard baking), another suitable process, or a combinationthereof. In some embodiments, the etching process may be dry etchprocess, wet etch process, plasma etching process, reactive ion etchingprocess, another suitable process or a combination thereof.

Next, according to some embodiments, as shown in FIG. 1K, a well region111 is formed in the epitaxial layer 102 by a doping process (forexample, an ion implantation process), and a heavily doped region 112 isformed in the well region 111 by another doping process (for example, anion implantation process). According to some embodiments, the wellregion 111 acts as the channel region of the semiconductor device 100,and the heavily doped region 112 acts as the source (S) of thesemiconductor device 100. In the embodiment, the trench 104 issurrounded by the well region 111 and the heavily doped region 112. Inthe embodiment, the well region 111 has a second conductive type that isdifferent from that of the substrate 101, and the heavily doped region112 has the first conductive type that is the same as that of thesubstrate 101. In the embodiment, the second conductive type is p-type,but it is not limited thereto. In other embodiments, the secondconductive type may be n-type. In some embodiments, the dopingconcentration of the heavily doped region 112 is greater than that ofthe substrate 101 and the epitaxial layer 102.

According to some embodiments, as shown in FIG. 1L, a first metal layer113 is formed on the second insulating layer 108 and the thirdinsulating layer 110 by a deposition process. The first metal layer 113penetrates the second insulating layer 108 to electrically connect tothe heavily doped region 112. In some embodiments, the first metal layer113 may be Ag, Cu, Au, Pt, W, Po or another suitable conductivematerial. In some embodiments, the deposition process may be physicalvapor deposition (PVD), chemical vapor deposition (CVD), anothersuitable process or a combination thereof.

In some embodiments, a second metal layer (not shown) is formed on thethird insulating layer 110 by a deposition process. The second metallayer is through the third insulating layer 110, the gate electrode 109and the second insulating layer 108 to electrically connect to the gateelectrode 109 and the shield electrode 106. In some embodiments, thesecond metal layer may be Ag, Cu, Au, Pt, W, Po or another suitableconductive material. In some embodiments, the deposition process may bephysical vapor deposition (PVD), chemical vapor deposition (CVD),another suitable process or a combination thereof. After forming thefirst metal layer 113 and the second metal layer, the process forforming the semiconductor device 100 is complete.

According to some embodiments of the invention, due to the deposition ofthe mask layer, excessive removal of the first insulating layer can beavoided during the removal of a portion of the first insulating layer(i.e. the undercut effect of the first insulating layer 105 can beavoided). In other words, thanks to the deposition of the mask layer,after removing a portion of the first insulating layer, the top surfaceof the remaining portion of the first insulating layer may be higherthan the top surface of the shield electrode. Therefore, afterdepositing the second insulating layer, the IGSSR leakage is less likelyto occur on the profile of the second insulating layer formed on thefirst insulating layer and the shield electrode. In addition, theprofile of the second insulating layer formed on the first insulatinglayer and the shield electrode can also reduce the Qgd, therebyimproving the performance of the semiconductor device.

While the disclosure has been described by way of example and in termsof the embodiments, it should be understood that the disclosure is notlimited to the disclosed embodiments. On the contrary, it is intended tocover various modifications and similar arrangements (as would beapparent to those skilled in the art). Therefore, the scope of theappended claims should be accorded the broadest interpretation so as toencompass all such modifications and similar arrangements.

1. A method for forming a semiconductor device, comprising: providing asubstrate having a first conductive type; forming an epitaxial layerhaving the first conductive type on the substrate; forming a trench inthe epitaxial layer; forming a first insulating layer in the trench andon a top surface of the epitaxial layer; forming a shield electrode anda mask layer on the first insulating layer in order; using the masklayer to remove a portion of the first insulating layer, wherein a topsurface of the first insulating layer is higher than a top surface ofthe shield electrode after removing the portion of the first insulatinglayer; removing the mask layer; forming a second insulating layer on thefirst insulating layer and the shield electrode; forming a gateelectrode on the second insulating layer; forming a well region having asecond conductive type in the epitaxial layer, wherein the secondconductive type is different from the first conductive type; and forminga heavily doped region having the first conductive type in the wellregion.
 2. The method of claim 1, wherein forming the shield electrodeand the mask layer comprises: filling the shield electrode in the lowerportion of the trench; forming a mask material layer on the shieldelectrode, wherein the mask material layer completely fills the trench;and removing a portion of the mask material layer to form the masklayer, and a remaining space of the trench is kept on the mask layer. 3.The method of claim 1, wherein the thickness of the mask layer issmaller than the thickness of the shield electrode.
 4. The method ofclaim 1, wherein the epitaxial layer in the trench is exposed afterremoving the portion of the first insulating layer.
 5. The method ofclaim 1, wherein the portion of the first insulating layer includes aportion of the first insulating layer on the top surface of theepitaxial layer and an upper portion of the first insulating layer inthe trench.
 6. The method of claim 1, wherein the shield electrode andthe mask layer are surrounded by the first insulating layer.
 7. Themethod of claim 1, wherein the second insulating layer forms a U-shapedupper surface on the first insulating layer and the shield electrode. 8.The method of claim 1, wherein the second insulating layer forms astepped upper surface on the first insulating layer and the shieldelectrode, and a first portion of the second insulating layer on thefirst insulating layer is higher than a second portion of the secondinsulating layer on the shield electrode.
 9. The method of claim 1,wherein the thickness of the first insulating layer is greater than thethickness of the second insulating layer.
 10. The method of claim 1,further comprising: forming a third insulating layer on the gateelectrode; and forming a first metal layer and a second metal layer onthe third insulating layer, wherein the first metal layer iselectrically connected to the heavily doped region, and the second metallayer is electrically connected to the gate electrode and the shieldelectrode.
 11. A semiconductor device, comprising: a substrate having afirst conductive type; an epitaxial layer having the first conductivetype disposed on the substrate, and a trench is in the epitaxial layer;a well region disposed on the epitaxial layer and having a secondconductive type that is different from the first conductive type; aheavily doped region disposed on the well region and having the firstconductive type; a shield electrode disposed in the trench, wherein theshield electrode is separated from the epitaxial layer by a firstinsulating layer, and the top surface of the first insulating layer ishigher than the top surface of the shield electrode; and a gateelectrode disposed in the trench and over the shield electrode, whereinthe gate electrode is separated from the epitaxial layer and the shieldelectrode by a second insulating layer, wherein the second insulatinglayer forms a stepped upper surface on the first insulating layer andthe shield electrode, and the gate electrode has a stepped bottomsurface in contact with the stepped upper surface of the secondinsulating layer, and the stepped upper surface of the second insulatinglayer has a curved middle portion vertically overlapped with the shieldelectrode.
 12. (canceled)
 13. The semiconductor device of claim 11,wherein the first portion of the second insulating layer on the firstinsulating layer is higher than the second portion of the secondinsulating layer on the shield electrode.
 14. The semiconductor deviceof claim 11, wherein the thickness of the first insulating layer isgreater than the thickness of the second insulating layer.
 15. Thesemiconductor device of claim 11, further comprising: a third insulatinglayer disposed on the gate electrode; and a first metal layer and asecond metal layer disposed on the third insulating layer, wherein thefirst metal layer is electrically connected to the heavily doped region,and the second metal layer is electrically connected to the gateelectrode and the shield electrode.
 16. The semiconductor device ofclaim 11, wherein the shield electrode is surrounded by the firstinsulating layer.
 17. The semiconductor device of claim 11, wherein thegate electrode is surrounded by the second insulating layer.
 18. Thesemiconductor device of claim 11, wherein an upper portion of the trenchis surrounded by the well region and the heavily doped region.
 19. Thesemiconductor device of claim 11, wherein the material of the secondinsulating layer is different from that of the first insulating layer.20. The semiconductor device of claim 11, wherein the material of thegate electrode is different from that of the shield electrode.
 21. Thesemiconductor device of claim 11, wherein a lowest portion of the curvedmiddle portion is lower than a topmost surface of the first insulatinglayer.